In the exploration of microscopic phenomena and the precise measurement of semiconductor devices, a stable and reliable probe station with flexible operation is an indispensable precision instrument. The manual probe station series developed by AKAM Technology is specifically designed to meet the rigorous demands of researchers and engineers in high-precision operations, offering exceptional performance and user-friendly design to serve as an essential laboratory tool.

Core Advantages: Stability, Precision, and Usability

AKAM Technology's manual probe stations prioritize stability and operational convenience in their design. The core manual platform components not only provide basic sample support but also offer optional pre-loaded rails that significantly simplify the process of loading and unloading wafers or samples. This design enhances operational efficiency, particularly in scenarios requiring frequent sample changes or batch testing.

The stations feature both coarse and fine adjustment capabilities for the Z-axis position of both the platen and chuck, ensuring micron-level vertical positioning accuracy to establish a solid foundation for precise contact operations.

Robust Construction and Flexible Configuration

The structural integrity of probe stations directly impacts measurement accuracy. AKAM Technology's manual probe stations incorporate sturdy cast steel platens capable of stably accommodating up to 10 magnetic or vacuum-based positioners. This design ensures long-term stability while providing ample space for probe arrangement to accommodate various testing configurations.

For applications requiring low-leakage current testing, the stations offer coaxial and triaxial chuck options, along with optional shielding enclosures that effectively isolate external electromagnetic interference and environmental factors to ensure reliable test data.

Precision Microscopic Observation and Positioning

At microscopic scales, precise observation is critical. AKAM Technology's manual probe stations feature standard boom-mounted microscope assemblies that allow full-range XYZ positioning, enabling users to easily adjust viewing angles for optimal observation. The stations incorporate high-resolution microscopic positioners with 80 TPI (threads per inch) lead screws, achieving micron-level probe positioning accuracy for precise contact with microscopic device features.

Specialized RF Testing Capabilities

Responding to growing demands in RF device testing, AKAM Technology provides comprehensive RF solutions for its manual probe stations. These include customizable RF probes for various frequency and impedance requirements, specialized RF chucks for superior signal integrity, and dedicated shielding enclosures to minimize signal interference and loss. These RF options enable the stations to handle diverse applications from fundamental research to advanced RF device production testing.

Comprehensive Model Selection

AKAM Technology offers multiple manual probe station models to accommodate different applications:

• DS – AMC100 Manual Probe Station: For basic wafer testing and device analysis
• DS – APS150 Analytical Probe Station: Designed for high-precision analytical applications
• DS – SPS-4-6 Manual Probe Station: Suitable for various sample sizes
• DS – AMC200 Manual Probe Station: Features larger sample capacity and higher precision
• DS – APS200 Analytical Probe Station: Enhanced analytical capabilities
• DS-EPS-4 Manual Probe Station: Provides additional configuration options

With their comprehensive advantages in structural design, operational precision, configuration flexibility, and specialized application support, AKAM Technology's manual probe station series has become an essential precision measurement tool in semiconductor, microelectronics, and materials science research and production.